发明名称 SELF-SUPPORTING FILM, SELF-SUPPORTING STRUCTURE, METHOD FOR MANUFACTURING SELF-SUPPORTING FILM, AND PELLICLE
摘要 Provided is a self-supporting film having excellent optical characteristics as a result of being independently provided with an anti-reflection function. The self-supporting film comprises a concave-convex structure layer in which concave and convex shapes are periodically formed in the surface thereof, wherein the concave and convex shapes are periodically formed on at least one side of the concave-convex structure layer, the self-supporting film has an average thickness in the range of 0.2 µm to 20.0 µm, and the concave-convex structure layer has a yield strain of 1% or higher and a tensile elongation of 10% or higher.
申请公布号 WO2011129378(A1) 申请公布日期 2011.10.20
申请号 WO2011JP59207 申请日期 2011.04.13
申请人 ASAHI KASEI E-MATERIALS CORPORATION;DOI SEITARO;IWAMURA KENICHIRO;NAMATAME TAKUJI 发明人 DOI SEITARO;IWAMURA KENICHIRO;NAMATAME TAKUJI
分类号 C08J5/18;G03F1/62 主分类号 C08J5/18
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