发明名称 SYSTEMS AND METHODS FOR COOLING AN OPTIC
摘要 <p>Devices are described herein which may comprise an optic having a non- planar surface, the non-planar surface having, an optically active portion; and a flow guide directing gas upon the non-planar surface to produce turbulent flow on at least a portion of the optically active portion of the non-planar surface to cool the optic.</p>
申请公布号 WO2011130327(A1) 申请公布日期 2011.10.20
申请号 WO2011US32187 申请日期 2011.04.12
申请人 CYMER, INC.;ERSHOV, ALEXANDER, I.;MORSE, ROBERT, L.;PARTLO, WILLIAM, N.;PATE, CHRISTOPHER, P. 发明人 ERSHOV, ALEXANDER, I.;MORSE, ROBERT, L.;PARTLO, WILLIAM, N.;PATE, CHRISTOPHER, P.
分类号 H01J3/14 主分类号 H01J3/14
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