<p>Devices are described herein which may comprise an optic having a non- planar surface, the non-planar surface having, an optically active portion; and a flow guide directing gas upon the non-planar surface to produce turbulent flow on at least a portion of the optically active portion of the non-planar surface to cool the optic.</p>
申请公布号
WO2011130327(A1)
申请公布日期
2011.10.20
申请号
WO2011US32187
申请日期
2011.04.12
申请人
CYMER, INC.;ERSHOV, ALEXANDER, I.;MORSE, ROBERT, L.;PARTLO, WILLIAM, N.;PATE, CHRISTOPHER, P.
发明人
ERSHOV, ALEXANDER, I.;MORSE, ROBERT, L.;PARTLO, WILLIAM, N.;PATE, CHRISTOPHER, P.