| 摘要 |
PROBLEM TO BE SOLVED: To enlarge swing angle of a mirror part in an optical reflection element using a meandering oscillation part.SOLUTION: The optical reflection element 1 comprises a fixed frame 2, a pair of low-speed meandering oscillation parts 3 with their outer ends supported by portions facing with each other on the inside of the fixed frame 2, a movable frame 4 supported by each inner end of the low-speed meandering oscillation parts 3, a pair of high-speed meandering oscillation parts 5 with their inner ends supported by portions of the movable frame 4 on the inside orthogonal to the oscillation shaft of the low-speed meandering oscillation parts 3, and a mirror part 6 supporting inner ends of the high-speed meandering oscillation parts 5 so that the curvature of a curved part 7 of the high-speed meandering oscillation parts 5 is made smaller from the inner end side toward the outer end side. |
