INSPECTING DEVICE, DEFECT CLASSIFYING METHOD, AND DEFECT DETECTING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an inspecting device that detect micropipe defects formed in an SiC substrate and an epitaxial layer and a defect in a base surface with high precision, and discriminates them from other defects.SOLUTION: A confocal differential interference image of an SiC substrate surface or epitaxial layer surface is picked up using a confocal scanner including a differential interference optical system. The confocal differential interference image shows unevenness change of approximately several nm of a sample surface in the form of a luminance distribution, so a crystal defect appearing on the SiC substrate surface or epitaxial layer surface is detected based upon the luminance distribution. The luminance distribution varies in accordance with kinds of defects, so the defect is classified from points of view of the shape and luminance distribution of the defect image. In particular, the micropipe defect and in-base-plane defect can be discriminated from other defects by using the classifying method.