Improved reduction of static charge in spin chucks is achieved by providing one or more pin assemblies which are formed from chemically inert material and which include an electrically conductive inlay.
申请公布号
WO2011128811(A2)
申请公布日期
2011.10.20
申请号
WO2011IB51475
申请日期
2011.04.06
申请人
LAM RESEARCH AG;LAM RESEARCH CORPORATION;BRUGGER, MICHAEL;LACH, OTTO
