| 摘要 |
PROBLEM TO BE SOLVED: To shorten a time used for determining a height map of a substrate.SOLUTION: A level sensor 1 configured to measure a height level of a substrate disposed in a measurement position. The level sensor 1 includes: a projection unit 3 to project a plurality of measurement beams in the plurality of measurement positions on the substrate 2; a detection unit 4 to receive the measurement beam after reflection on the substrate 2; and a processing unit 5 to calculate the height level based on the reflection measurement beam that the detection unit 4 receives, wherein the substrate 2 is disposed in the measurement position and the projection unit 3, and the detection unit 4 are disposed neighboring to the substrate 2. |
