| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas generator which attains reduction in a work load and a cost for replacement of an NaF pellet in an HF adsorption column.SOLUTION: The fluorine gas generator 100 includes an electrolytic cell 1. An electrolytic bath 1a is formed in the electrolytic cell 1. A negative pole 5 is disposed in a negative pole chamber 3 and a positive pole 6 is disposed in a positive pole chamber 4. An electrolysis of HF (Hydrogen Fluoride) is performed by applying voltage between the negative pole 5 and the positive pole 6. Hydrogen gas is mainly generated from the negative pole 5 of the electrolytic cell 1 and fluorine gas is mainly generated from the positive pole 6. Heating ovens 80, 81 for heating the NaF pellets packed in the HF adsorption columns 60 to 63 are provided. The HF adsorption columns 60, 62 are provided in the heating oven 80 and the HF adsorption columns 61, 63 are provided in the heating oven 81. |
