| 摘要 |
PROBLEM TO BE SOLVED: To correctly identify the junction marks of a wire bonding junction after a shear test is performed, and to find a highly accurate wire residual rate.SOLUTION: The junction inspection test has: a step S1 to detect shear strength and perform a shear test, while wire bonding junctions 22 are sheared by a shear tester unit 32 at a fixed shear height H; and a step S2 to obtain the real picture 43 (i.e. pick-up image) of the junction marks 23 after the shear test is performed, to measure the height within a surface including the junction marks 23, to identify the aluminum residual section b of the junction marks 23 based on the height distribution within the surface including the junction marks 23 and the shear height H, and to identify the external form c of the junction marks 23 based on the real picture 43. The wire residual rate is calculated based on the aluminum residual area of the aluminum residual section b and the external form area of the external form c. |
