发明名称 PRODUCTION OF A CRYSTALLINE SEMICONDUCTOR MATERIAL
摘要 The invention relates to a method for producing a crystalline semiconductor material, wherein particles from the semiconductor material and/or a precursor compound of the semiconductor material are fed into a gas stream which has a sufficiently high temperature, in order to convert the particles of the semiconductor material from the solid into the liquid and/or gaseous state and/or in order to thermally decompose the precursor compound. In a further step, liquid semiconductor material is condensed and/or separated out of the gas stream and converted into a solid state to form monocrystalline or polycrystalline crystal structures.
申请公布号 WO2011128296(A1) 申请公布日期 2011.10.20
申请号 WO2011EP55636 申请日期 2011.04.11
申请人 SCHMID SILICON TECHNOLOGY GMBH;KERAT, UWE;SCHMID, CHRISTIAN;HAHN, JOCHEM 发明人 KERAT, UWE;SCHMID, CHRISTIAN;HAHN, JOCHEM
分类号 B22D27/04;C01B33/02;C30B15/00;C30B29/02 主分类号 B22D27/04
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