发明名称 |
PRODUCTION OF A CRYSTALLINE SEMICONDUCTOR MATERIAL |
摘要 |
The invention relates to a method for producing a crystalline semiconductor material, wherein particles from the semiconductor material and/or a precursor compound of the semiconductor material are fed into a gas stream which has a sufficiently high temperature, in order to convert the particles of the semiconductor material from the solid into the liquid and/or gaseous state and/or in order to thermally decompose the precursor compound. In a further step, liquid semiconductor material is condensed and/or separated out of the gas stream and converted into a solid state to form monocrystalline or polycrystalline crystal structures. |
申请公布号 |
WO2011128296(A1) |
申请公布日期 |
2011.10.20 |
申请号 |
WO2011EP55636 |
申请日期 |
2011.04.11 |
申请人 |
SCHMID SILICON TECHNOLOGY GMBH;KERAT, UWE;SCHMID, CHRISTIAN;HAHN, JOCHEM |
发明人 |
KERAT, UWE;SCHMID, CHRISTIAN;HAHN, JOCHEM |
分类号 |
B22D27/04;C01B33/02;C30B15/00;C30B29/02 |
主分类号 |
B22D27/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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