发明名称 SUPPORTING DEVICE, OPTICAL APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
摘要 The present invention provides a supporting device that supports an optical element, comprising: a first supporting member that is fixed to an outer circumference of the optical element; a plurality of members that is connected to an outer circumference of the first supporting member; and a second supporting member that supports the first supporting member via the plurality of members, wherein each of the plurality of members is configured such that the a rigidity thereof in a first direction inclined relative to a direction orthogonal to an optical axis of the optical element in a plane including the optical axis is lower than a rigidity thereof in each of two directions that are orthogonal to the first direction and that are orthogonal to each other.
申请公布号 US2011255183(A1) 申请公布日期 2011.10.20
申请号 US201113172695 申请日期 2011.06.29
申请人 CANON KABUSHIKI KAISHA 发明人 SUDOH YUJI
分类号 G02B7/02 主分类号 G02B7/02
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