MICROLITHOGRAPHY ILLUMINATION SYSTEMS, COMPONENTS AND METHODS,申请号US201113164860-传众专利搜索

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发明名称	MICROLITHOGRAPHY ILLUMINATION SYSTEMS, COMPONENTS AND METHODS
摘要	The disclosure relates to microlithography systems, such as EUV micro-lithography illumination systems, as well as related components, systems and methods.
申请公布号	US2011255067(A1)	申请公布日期	2011.10.20
申请号	US201113164860	申请日期	2011.06.21
申请人	CARL ZEISS SMT GMBH	发明人	WARM BERNDT;DENGEL GUENTHER
分类号	G03B27/74;G03B27/32	主分类号	G03B27/74
代理机构		代理人
主权项
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