发明名称 CAPACITIVE SENSING SYSTEM WITH DIFFERENTIAL PAIRS
摘要 A capacitive sensing system comprising two or more capacitive sensors, one or more AC power sources for energizing the capacitive sensors, and a signal processing circuit for processing signals from the sensors. The sensors are arranged in pairs, wherein the one or more AC power sources are arranged to energize a first sensor of a pair of the sensors with an alternating current or voltage 180 degrees out of phase to a current or voltage for a second sensor of the pair of sensors, and wherein a pair of the sensors provides a measuring unit for a single measured distance value, the signal processing circuit receiving an output signal from each sensor of the pair and generating a measured value related to the average distance between the sensors of the pair and the target.
申请公布号 US2011254565(A1) 申请公布日期 2011.10.20
申请号 US20100977288 申请日期 2010.12.23
申请人 MAPPER LITHOGRAPHY IP B.V. 发明人 DE BOER GUIDO;VAN BAAR JOHNNY JOHANNES JACOBUS;PADHYE KAUSTUBH PRABODH;MOSSEL ROBERT;VERGEER NIELS;STEENBRINK STIJN WILLEM HERMAN KAREL
分类号 G01R27/26;G01R35/00 主分类号 G01R27/26
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