发明名称 THERMAL-TYPE FLOWMETER, THERMAL-TYPE DEVICE FOR DISCRIMINATING GAS TYPE AND METHOD OF AUTOMATIC DETERMINATION OF GAS TYPE
摘要 PROBLEM TO BE SOLVED: To provide a thermal-type flowmeter and a method of automatic determination of a gas type which automatically determines the type of gas inside a channel, corrects gas flow rate with a correction value specified by the gas and which thereby detects the gas flow rate with high accuracy.SOLUTION: The thermal-type flowmeter includes: a thermal-type sensor 14 which is disposed in the channel 11, making the gas flow in the vertical direction and outputs a detection signal showing the difference between temperatures detected by an upstream-side temperature measuring resistance element 45 and a downstream-side temperature measuring resistance element 46; a pressure sensor 15 which detects pressure in the channel 11; a gas determining part 52, which determines the type of gas from the relation between a stop time detection signal outputted by the thermal-type sensor 14, at stoppage of the supply of the gas and the stop time pressure detected by the pressure sensor 15; a corrective value deciding part 53 which decides the corrective value for correcting a change in the sensor output characteristics of the thermal-type sensor 14, according to the determined type of the gas; and a flow rate calculating part 54 which corrects the detection signal of the thermal-type sensor 14 with the corrective value and calculates the flow rate of the gas flowing through the channel 11.
申请公布号 JP2011209147(A) 申请公布日期 2011.10.20
申请号 JP20100078012 申请日期 2010.03.30
申请人 YAMATAKE CORP 发明人 MURAOKA MANABU
分类号 G01F1/696 主分类号 G01F1/696
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