| 摘要 |
PROBLEM TO BE SOLVED: To provide an electronic component that has a high capacity and can keep suitable connection reliability.SOLUTION: In an Si capacitor 10, a capacitor 40, which is composed of a lower electrode 42, dielectric layer 44, and lower electrode 46, can expand the area of the lower electrode 42-dielectric layer 44-upper electrode 46 and can obtain a high capacitance because of being formed on a wall surface of a trench 30 formed on an Si substrate 20. Moreover, since a resin filling material 52 is filled into inside of the trench 30, a stress caused on the side wall of the trench 30 can be absorbed with a flexible resin filling material 52, and the side wall of the trench 30 is never cracked, even if increasing a capacitance by locating a recess (trench) at a narrow interval. |
