| 摘要 |
PROBLEM TO BE SOLVED: To provide a simple method of manufacturing a transparent conductive amorphous film without using a high vacuum container, and also to provide the transparent conductive amorphous film having conductivity, transparency and surface smoothness equal to or higher than a film produced in a conventional sputtering method.SOLUTION: The method of manufacturing the transparent conductive amorphous film containing zinc and tin elements includes spraying mist solution or dispersion liquid containing zinc and tin compounds onto a heated substrate to form the film. |
