| 摘要 |
PROBLEM TO BE SOLVED: To provide a radio frequency (RF) generator in which received data are stored for a predetermined time before receiving a defect instruction.SOLUTION: The present invention relates to a scalable RF generator including at least one power supply, at least one power amplifier receiving input from the power supply, a power supply control module, and a system controller. Output from the at least one power supply can be combined and applied to each of the power amplifiers. Output from each of the at least one power amplifiers can be combined to generate a single RF signal. A compensator module controls operation of the at least one power supply. The compensator module, the system control module and the power supply controller communicate in a daisy chain connection. |
