EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

摘要

PROBLEM TO BE SOLVED: To stabilize EUV light output, regarding an extreme ultraviolet light forming device.SOLUTION: The extreme ultraviolet light forming device burst-outputs extreme ultraviolet light based on laser light output from a driver laser, and is equipped with an energy control part to energy-control the top side pulse energy of one pulse or more to include at least a first pulse out of the extreme ultraviolet light burst-output, on the basis of a parameter log of the extreme ultraviolet light burst-output in the past.