| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and method for processing substrates, which improves yields of processes by using statistical defect handling procedures, models, and libraries in real time.SOLUTION: The apparatus and methods for processing substrates using pooled statistically based variance data, are provided. The statistically based variance data can include Pooled Polymer De-protection Variance (PPDV) data that is used to determine micro-bridging defect data, LER defect data, and LWR defect data. |
