发明名称 APPARATUS AND METHODS FOR SETTING UP OPTICAL INSPECTION PARAMETERS
摘要 Provided are novel methods and systems for setting up ranges of optical inspection parameters. These ranges may be later used for inspection of photovoltaic cells for discoloration, for example. A set of values corresponding to an inspection parameter, such as hue, saturation, and intensity, is obtained from a set-up image. The image includes multiple set-up areas, e.g., a defined group of pixels, wherein each set-up area is assigned a corresponding value in the set. A test image is then constructed from multiple test areas that are also associated with the values in the set. Each test area is assigned a color from a set of user defined colors based on the corresponding value and user defined ranges. A user interface includes both a range diagram and test image, which are used to adjust the ranges in the diagram that result in modification of the test image.
申请公布号 WO2011130171(A2) 申请公布日期 2011.10.20
申请号 WO2011US31951 申请日期 2011.04.11
申请人 KLA-TENCOR CORPORATION;DE GREEVE, JOHAN;SWERTS, BENJAMIN 发明人 DE GREEVE, JOHAN;SWERTS, BENJAMIN
分类号 G01N21/88;G01B11/00;G06T7/00;H01L31/042 主分类号 G01N21/88
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