| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for monitoring the state of a substrate carrier robot providing information for specifying a cause for occurrence of a trouble in carrying in case of occurrence of the trouble in carrying the substrate using the substrate carrier robot.SOLUTION: The device for monitoring the state provides the information for monitoring the state of the robot 30 for carrying the plurality of substrates 11 contained in a cassette 10 and includes information acquiring unit 3, 4, 15 for acquiring position and posture information on positions and postures of the substrates 11 contained in the cassette 10, a storage unit 7 for storing the position and posture information, and a display unit 8 for displaying the position and posture information. |
