| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating apparatus capable of measuring application trajectory correctly so as to adjust the position of a nozzle correctly even when periodic vibration is generated at moving of the main scanning direction of an imaging means.SOLUTION: An imaging part for imaging application trajectory is equipped with a pair of CCD cameras 90a, 90b whose imaging center positions are separated by half of the period S of the periodic vibration of the application trajectories T1, T2, T3 and T4, and which image an almost whole region of one cycle of the periodic vibration of the application trajectories T1, T2, T3 and T4. |
