| 摘要 |
PROBLEM TO BE SOLVED: To shorten a period of time required to acquire a signal for use in defect detection, without lowering the precision of defect detection.SOLUTION: By reducing the number of charged beams with which each pixel is irradiated, the period of time required for sampling is shortened and a sampling point is interpolated, and the detection strength is calculated from the sampling point and an interpolating point. The method has: the detecting step of detecting the signal strength of a sampling point on a panel by charged beam irradiation; the interpolating step of interpolating the signal strength at an interpolating point near the sampling point by using the signal strength at the sampling point thus detected; the extracting step of associating the sampling point and the interpolating point with a pixel of a panel and extracting a signal point for use in defect detection from among the sampling and interpolating points associated with each respective pixel; and the signal strength calculating step of calculating one signal strength for each pixel by using the signal strengths at the sampling and interpolating points extracted in the extracting step. |
