METHOD FOR PRODUCING TITANIUM NITRIDE

摘要

PROBLEM TO BE SOLVED: To provide a method for producing titanium nitride which enables titanium nitride to be generated at a lower heating temperature than a conventional method and production conditions to be made simple.SOLUTION: A titanium compound solution prepared by dissolving a titanium complex and/or a titanium salt in a solvent is used. The titanium complex and/or the titanium salt in the titanium compound solution is brought into contact with ammonia gas in a heated atmosphere to generate titanium nitride.