发明名称 |
APPARATUS AND METHOD FOR CONTROLLING HEATING LAMP OF RAPID HEAT TREATMENT EQUIPMENT |
摘要 |
The method of the present invention for controlling a heating lamp of rapid heat treatment equipment comprises: a step wherein a heating lamp group is divided into a plurality of subgroups to determine graphical data regarding input voltage versus the reference input current that is applied to the subgroups uniformly; a step wherein actual input current respectively applied to each group is measured to obtain graphical data regarding input voltage versus actual input current; a step wherein a difference value for calibration of each subgroup is obtained from the difference between the reference input current and the actual input current; and a step wherein the difference value for calibration is reflected to apply a voltage to said subgroup individually. According to the present invention, substrate heating takes place uniformly because differences of calibration are reflected in actual input current to apply a voltage to a subgroup.
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申请公布号 |
US2011255848(A1) |
申请公布日期 |
2011.10.20 |
申请号 |
US200913132674 |
申请日期 |
2009.11.27 |
申请人 |
JI SANG HYUN;LEE DAE YONG;LEE SEUNG HWAN |
发明人 |
JI SANG HYUN;LEE DAE YONG;LEE SEUNG HWAN |
分类号 |
F27D11/00 |
主分类号 |
F27D11/00 |
代理机构 |
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