FLUORINE GAS GENERATION DEVICE

摘要

Disclosed is a fluorine gas generation device provided with: a first main passage which is for supplying fluorine gas to an external device and which is connected to a first air chamber of an electrolytic cell; a first conveyor which draws and conveys fluorine gas from the first air chamber; a first pressure detector which detects pressure on the upstream side of the first conveyor; a first pressure adjustment valve for returning the fluorine gas discharged from the first conveyor to the intake side of the first conveyor; a control device which controls the opening degree of the first pressure adjustment valve so that the detection pressure of the first pressure detector reaches a first set value; a start-up valve which is provided on the upstream side of the pressure detector; and a differential pressure detector which detects the differential pressure between each side of the start-up valve when the start-up valve is closed. When the fluorine gas generation device is started up, the control device modifies the set value so that the differential pressure between each side is within a set range, and opens the start-up valve when the differential pressure between each side is within the set range.