| 摘要 |
A scanning microscope (10) comprises a stage (18) for holding a sample (20), a scan mechanism, a probing system for probing a region (24) of the sample (20), a position sensor (80, 82), and a controller. The scan mechanism is designed for translating the stage (18) between at least two axial positions. The probing system 10 comprises an optical element and a photosensor having a readout region, wherein the readout region extends in a direction (14), which is transverse to an ideal orientation (72) of the stage (18). The position sensor (80, 82) serves for measuring a transverse position (84, 86) of the stage (18) and/or of an orientation (74) of the stage (18). The controller (30) serves for adapting the probing system as a function of the measured 15 transverse position (84, 86) and/or the measured orientation (74). |
