发明名称 APPARATUS AND METHOD FOR MACHINING SPECIMEN
摘要 An apparatus and a method of processing a specimen includes a final analysis specimen that is manufactured by sequentially performing specimen processing processes using a laser beam with respect to an initial laminate specimen loaded on a stage. As a result, the final specimen manufacturing time may be reduced and the quality of the final specimen may be improved.
申请公布号 KR20110114028(A) 申请公布日期 2011.10.19
申请号 KR20100033433 申请日期 2010.04.12
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 CHOI, SEUNG HO;BYUN, GWANG SEON;LEE, SUN YOUNG;LEE, KYUNG WOO;LEE, EUN GOO;KIM, HONG SHIK
分类号 B23K26/36 主分类号 B23K26/36
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