An apparatus and a method of processing a specimen includes a final analysis specimen that is manufactured by sequentially performing specimen processing processes using a laser beam with respect to an initial laminate specimen loaded on a stage. As a result, the final specimen manufacturing time may be reduced and the quality of the final specimen may be improved.
申请公布号
KR20110114028(A)
申请公布日期
2011.10.19
申请号
KR20100033433
申请日期
2010.04.12
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
CHOI, SEUNG HO;BYUN, GWANG SEON;LEE, SUN YOUNG;LEE, KYUNG WOO;LEE, EUN GOO;KIM, HONG SHIK