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发明名称
STRAIN ENGINEERED COMPOSITE SEMICONDUCTOR SUBSTRATES AND METHODS OF FORMING SAME
摘要
申请公布号
EP2377153(A1)
申请公布日期
2011.10.19
申请号
EP20080875786
申请日期
2008.12.19
申请人
S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES
发明人
LETERTRE, FABRICE;BETHOUX, JEAN-MARC;BOUSSAGOL, ALICE
分类号
H01L21/762;H01L21/20;H01L33/00
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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