Deformable mirror device with replaceable mirror sheet and method to adhere a mirror sheet

摘要

Deformable mirror device comprising a reflective layer (1) for reflecting electromagnetic radiation, an actuator (2) for deforming the reflective layer essentially perpendicular to its surface and a base (3) for supporting the actuator. To allow an easy removal of mirror sheet comprising the reflective layer this deformable mirror comprises a first electrode (12) coupled to the actuator (2), and a second electrode (11), which first and second electrodes are electrically isolated and arranged relative to each other. The invention also relates to a method to adhere a mirror sheet of a deformable mirror to an actuator.