发明名称 FLUID CONTROL METHOD AND FLUID CONTROL DEVICE
摘要 <p>A plurality of fluids are accurately and quickly mixed such that a target characteristic is attained. A fluid control device is provided with flow channels (5, 7, 11,13) for allowing a plurality of to-be-mixed fluids to flow; flow channels (15, 17) for allowing a mixed fluid to flow; a pump (19) for shifting the fluids in the flow channels; flow rate adjusting units (11b, 13b) for respectively adjusting flow rates of a plurality of to-be-mixed fluids; a measuring unit (15a) for optically measuring a characteristic of the mixed fluid; and a control unit (21) that controls the flow rate adjusting units (11b, 13b) to adjust the flow rates of the to-be-mixed fluids based on a result of the measurement of the measuring unit (15a), such that the mixed fluid attains a target characteristic.</p>
申请公布号 KR20110114613(A) 申请公布日期 2011.10.19
申请号 KR20117018132 申请日期 2010.02.10
申请人 KURASHIKI BOSEKI KABUSHIKI KAISHA 发明人 YOKOTA HIROSHI
分类号 B01F15/04;B01F3/08;B01F5/00;G01N21/33;G01N21/35;G01N21/359;G01N37/00;H01L21/306 主分类号 B01F15/04
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