SIDE STORAGE HAVING GAS INJECTION BLOCK,申请号KR20110010277-传众专利搜索

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发明名称	SIDE STORAGE HAVING GAS INJECTION BLOCK
摘要
申请公布号	KR101075171(B1)	申请公布日期	2011.10.19
申请号	KR20110010277	申请日期	2011.02.01
申请人	SEMICONDUCTOR MATERIAL INCORPORATED CO., LTD.	发明人	JEON, WON GU
分类号	H01L21/02;H01L21/302	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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