ANTENNA STRUCTURE AND PLASMA GENERATION APPARATUS,申请号KR20100033576-传众专利搜索

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发明名称	ANTENNA STRUCTURE AND PLASMA GENERATION APPARATUS
摘要
申请公布号	KR20110114118(A)	申请公布日期	2011.10.19
申请号	KR20100033576	申请日期	2010.04.13
申请人	LEE, YONG KWAN	发明人	LEE, YONG KWAN
分类号	H05H1/46;H01L21/3065	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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