Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator,申请号GB20110014777-传众专利搜索

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发明名称	Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator
摘要
申请公布号	GB2479702(A)	申请公布日期	2011.10.19
申请号	GB20110014777	申请日期	2009.04.13
申请人	MKS INSTRUMENTS, INC	发明人	SOUHEIL BENZERROUK;SIDDHARTH P NAGARKATTI;ANDREW COWE;ALI SHAJII;JESSE E AMBROSINA;KEN TRAN;XING CHEN
分类号	H01J37/32;H05H1/24	主分类号	H01J37/32
代理机构		代理人
主权项
地址

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