| 分类号 |
C04B35/00;C04B35/42;C04B35/45;C04B35/457;C04B35/465;C04B35/472;C04B35/475;C04B35/491;C04B35/493;C04B35/495;C04B35/497;C04B35/624;C23C14/08;C23C16/40;C23C18/12;C30B29/22;H01L21/314;H01L21/316;H01L21/8246;H01L27/105;H01L41/09;H01L41/187;H01L41/22;H01L41/314;H01L41/317;H01L41/318;H01L41/39 |
主分类号 |
C04B35/00 |
