| 摘要 |
<p>An X-ray inspection apparatus (100) includes an X-ray source (10), an X-tray detector (23), an X-ray detector drive unit (22), an image acquisition control mechanism (30) for controlling driving of the X-ray detector (23) by the X-ray detector drive unit (22) and acquisition of image data from the X-ray detector (23), an inspection object drive mechanism (20) for moving an inspection object (1), an X-ray source control mechanism (60), and an operation unit (70). The X-ray source control mechanism (60) causes the X-ray source (10) to output an X-ray based on an instruction from the operation unit (70). The image acquisition control mechanism (30) moves the X-ray detector (23) to a plurality of image pickup positions aligned in the Y direction based on an instruction from the operation unit (70). The inspection object drive mechanism (20) moves the inspection object (1) in the Y direction such that the X-ray detector (23) can detect an X-ray transmitted through the inspection object (1) at each image pickup position based on an instruction from the operation unit (70).</p> |
