发明名称
摘要 A molding apparatus including an upper half having a substrate mounting plate; and a lower half coupled with the upper half to form a cavity there between, wherein the substrate mounting plate faces the cavity, wherein the lower half includes a projecting part which has a top surface which faces the cavity and which projects from the bottom surface of the lower half toward a substantial center point of the substrate mounting plate, wherein the substrate mounting plate is adjustably mounted on the upper half and movable toward the lower half, and wherein the upper half includes a clamp mounted thereon which surrounds the projecting part when the upper and lower halves are coupled with each other.
申请公布号 JP4794354(B2) 申请公布日期 2011.10.19
申请号 JP20060142991 申请日期 2006.05.23
申请人 发明人
分类号 H01L21/56;H01L23/12 主分类号 H01L21/56
代理机构 代理人
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