| 摘要 |
A vacuum pump comprising a wall configured to form a closed-off fluid volume, the wall being movable by means of a first force for producing a volume reduction of the closed-off fluid volume and, after a preceding volume reduction, the wall being movable by means of a second force for producing a volume increase in the closed-off fluid volume; an inlet port in fluid communication with the closed-off fluid volume, the inlet port having an inlet valve arranged to be connected to a vacuum space; an outlet port in fluid communication with the closed-off fluid volume, the outlet port including an outlet valve arranged to exhaust external to the closed-off fluid volume; and an elastically deformable material compressible by the first force and upon expansion, after termination of the first force, produces the second force, wherein the first force exhausts fluid from the closed-off fluid volume through the outlet port and the second force draws fluid from the vacuum space through the inlet port into the closed-off fluid volume.
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