发明名称 |
Method of correcting a flare and computer program product |
摘要 |
A method of correcting a flare comprising: calculating a distribution of a flare value corresponding to pattern data on the pattern data as a flare map; calculating an occupancy of a pattern having a predetermined flare value on the pattern data as a flare value occupancy for each flare value, by using the flare map; determining a reference flare value to be a reference of the flare value based on the distribution of the flare value occupancy; and performing a pattern correction corresponding to the flare value with a pattern correction amount at the reference flare value as a reference. |
申请公布号 |
US8039177(B2) |
申请公布日期 |
2011.10.18 |
申请号 |
US20100817968 |
申请日期 |
2010.06.17 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
UNO TAIGA;ARISAWA YUKIYASU;AOYAMA HAJIME |
分类号 |
G03F9/00;G03F1/24;G03F1/68;H01L21/027 |
主分类号 |
G03F9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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