发明名称 |
Piezoelectric-driven MEMS device and method for manufacturing the same |
摘要 |
A piezoelectric-driven MEMS device can be fabricated reliably and consistently. The piezoelectric-driven MEMS device includes: a movable flat beam having a piezoelectric film disposed above a substrate with a recessed portion such that the piezoelectric film is bridged over the recessed portion, piezoelectric drive mechanisms disposed at both ends of the piezoelectric film and configured to drive the piezoelectric film, and a first electrode disposed at the center of the substrate-side of the piezoelectric film, and a second electrode disposed on a flat part of the recessed portion of the substrate and facing the first electrode of the movable flat beam.
|
申请公布号 |
US8038890(B2) |
申请公布日期 |
2011.10.18 |
申请号 |
US20080038568 |
申请日期 |
2008.02.27 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
KAWAKUBO TAKASHI;NAGANO TOSHIHIKO;ABE KAZUHIDE;NISHIGAKI MICHIHIKO |
分类号 |
B81B3/00;G01D15/00;G11B5/127;H01G5/18;H01G7/06;H01H57/00;H01H59/00;H01L21/00;H01L21/302;H01L21/461;H01L41/08;H01L41/09;H01L41/18;H01L41/187;H01L41/22;H02N1/00;H03H9/24 |
主分类号 |
B81B3/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|