摘要 |
The present invention relates to a liquid device, liquid device manufacturing apparatus and method, and an image display device that are so configured as to achieve increase in the capacitance and allow suppression of breakdown. An insulating film 43 having a higher insulating property and a higher dielectric constant than a water-repellent film 44 is newly formed between a lower electrode 42 and the water-repellent film 44, to thereby compensate for the dielectric strength and suppress breakdown. As the material of the insulating film 43, one having a higher insulating property and a higher dielectric constant is preferable. For example, polymer materials and inorganic materials are cited. For example, SOG is a silica-based inorganic coating material. A solution thereof is applied and deposited by a spin-coating method or the like, followed by being turned to glass through baking at a comparatively-low temperature. The present invention can be applied to a liquid device.
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