发明名称 |
Pattern matching apparatus and scanning electron microscope using the same |
摘要 |
A pattern matching apparatus comprising: means for storing photographed image data of a semiconductor device; means for storing CAD data of said semiconductor device; an information input means for inputting information on the white band width contained in said image data; a pattern extracting means for extracting a pattern on the semiconductor device from said image data by using the white band width information; and a matching means for matching said pattern with the CAD data.
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申请公布号 |
US8041104(B2) |
申请公布日期 |
2011.10.18 |
申请号 |
US20050207936 |
申请日期 |
2005.08.22 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
TOYODA YASUTAKA;IKEDA MITSUJI;TAKANE ATSUSHI |
分类号 |
G06K9/00 |
主分类号 |
G06K9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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