发明名称 Electro-acoustic sensing device
摘要 An electro-acoustic sensing device including a sensing chip, a carrier chip and a sealing element is provided. The sensing chip is for electro-acoustic transuding and thereby outputting an electrical signal. The carrier chip disposed below the sensing chip has at least one second connecting point, at least one electrical channel and at least one channel connecting point. The second connecting point is electrically contacted with the first connecting point. The second connecting point and the channel connecting point are located at different surfaces of the carrier chip. The electrical channel passes through the carrier chip and electrically connects the second connecting point and the channel connecting point. The electrical signal is transmitted to the channel connecting point via the first and the second connecting points and the electrical channel. The sealing element is disposed between the sensing chip and the carrier chip for air-tight coupling the two chips.
申请公布号 US8039910(B2) 申请公布日期 2011.10.18
申请号 US20070964995 申请日期 2007.12.27
申请人 INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE 发明人 YEN KAI-HSIANG;CHEN JEN-YI;SUNG PO-HSUN
分类号 H01L29/84 主分类号 H01L29/84
代理机构 代理人
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