发明名称 |
Apparatus and method for manufacturing magnetic recording medium |
摘要 |
A method and apparatus for manufacturing a magnetic recording medium uses a small-diameter insulating substrate. The apparatus includes a carrier for a special size of 3.5 inches for receiving a plurality of small-diameter insulating substrates. Seed layers are deposited on the substrates, then each substrate is rotated to shift the position of the substrate so that the movable claw contacts the deposited seed layer. A bias voltage is applied via the movable claw for subsequent deposition layers.
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申请公布号 |
US8038797(B2) |
申请公布日期 |
2011.10.18 |
申请号 |
US20070619309 |
申请日期 |
2007.01.03 |
申请人 |
FUJI ELECTRIC CO., LTD. |
发明人 |
SHIMIZU TAKAHIRO;HARA AKIHIDE |
分类号 |
C23C16/00;B05D5/12;B23H7/26;C23C14/00 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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