发明名称 Laser processing apparatus and laser processing method
摘要 The present invention relates to a laser processing apparatus and the like having a structure for implementing at the same time both an efficient laser processing in the place where a laser beam is difficult to reach and a laser processing without damages in the place where the laser beam is easy to reach. This laser processing apparatus comprises a laser light source, an irradiation optical system applying a laser beam to an object while scanning the laser beam, a photo-detector detecting the laser beam applied from the irradiation optical system, and a control section of making switching between a continuous oscillation and a pulse oscillation of the laser beam at the laser light source. In particular, the control section makes a continuous oscillation of the laser beam with respect to the laser light source in the case in which the laser beam applied from the irradiation optical system is detected at the photo-detector; while it makes a pulse oscillation of the laser beam with respect to the laser light source in the case in which no laser beam applied from the irradiation optical system is detected at the photo-detector.
申请公布号 US8039778(B2) 申请公布日期 2011.10.18
申请号 US20080256974 申请日期 2008.10.23
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 KAKUI MOTOKI;NAKAMAE KAZUO;TAMAOKI SHINOBU
分类号 G01J1/32 主分类号 G01J1/32
代理机构 代理人
主权项
地址
您可能感兴趣的专利