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发明名称
SEMICONDUCTOR DEVICE INSPECTION APPARATUS
摘要
申请公布号
KR20110113554(A)
申请公布日期
2011.10.17
申请号
KR20100105347
申请日期
2010.10.27
申请人
JT CORPORATION
发明人
YOU, HONG JUN;AHN, JUNG UG;KIM, SUN HWAL;KIM, MIN SEONG;SEO, YONG JIN
分类号
G01R31/26;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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