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发明名称
TAPE FOR PROCESSING WAFER
摘要
申请公布号
KR20110113291(A)
申请公布日期
2011.10.17
申请号
KR20100032600
申请日期
2010.04.09
申请人
FURUKAWA ELECTRIC CO., LTD.
发明人
ISHIGURO KUNIHIKO;ISHIWATA SHINICHI;MORISHIMA YASUMASA
分类号
H01L21/78;H01L21/301
主分类号
H01L21/78
代理机构
代理人
主权项
地址
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