发明名称 ARTIKELLADE-/-ENTLADEVERFAHREN UND ARTIKELLADE-/- ENTLADEEINRICHTUNG, BELICHTUNGSVERFAHREN UND BELICHTUNGSVORRICHTUNG UND VERFAHREN ZUR BAUELEMENTEHERSTELLUNG
摘要 Provide loading/unloading apparatus to perform quickly exchanging article to be loaded on a placing table. It comprises a first step (S11) that determines a position of a placing table where articles to be unloaded is loaded to a second position (P6) that is different from a first position (P5) within said predetermined plane, a second step (S14) that unload the articles exist on the lading table that is positioned at said second position after said first step is performed, a third step (S16, S18) that determines a position of said placing table at said first position while said vertically moving member is positioned at a position lower than a lower surface of a loading member holding a next article to be loaded and waiting over said first position and higher than the placing surface of the placing table after said second step is performed, a fourth step (S17) that allows a loading member holding the next article to be loaded onto the placing table to wait over the first position before the placing table is positioned at the first position, and a fifth step (S20) for loading the next article onto the placing table positioned at the first position after the third step is performed.
申请公布号 AT525742(T) 申请公布日期 2011.10.15
申请号 AT20060811959T 申请日期 2006.10.18
申请人 NIKON CORPORATION 发明人 SUGIHARA, TARO
分类号 H01L21/00;G03F7/20;H01L21/67 主分类号 H01L21/00
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