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发明名称
PLASMA PROCESSING APPARATUS AND METHOD
摘要
申请公布号
KR20110113047(A)
申请公布日期
2011.10.14
申请号
KR20100032370
申请日期
2010.04.08
申请人
SEMES CO., LTD.
发明人
USHAKOV ANDREY;CHO, JUNG KEUN;NO, IL HO;YOON, CHANG RO;ROH, JAE MIN
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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