SILVER ALLOY TARGET FOR FORMING REFLECTION ELECTRODE FILM FOR ORGANIC EL ELEMENT, AND METHOD FOR MANUFACTURING THE SILVER ALLOY TARGET

摘要

[Abstract] Disclosed is a silver alloy target for forming a reflective electrode film for an organic EL element, which has a component composition containing 0.1% to 1.5% by mass of In and the remainder composed of Ag and unavoidable impurities. The average grain diameter of the crystal grain of the alloy is 150 to 400 µm, and the dispersion of the grain diameter of the crystal grain is 20% of the average grain diameter or less.