| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric device which maintains a vibrating portion and vibration electrode in a predetermined gap to assure sufficient airtightness.SOLUTION: The piezoelectric device has a piezoelectric vibrating board (20) including a vibrating portion (SB) that has a thickness-shear vibration mode, and a support frame portion (SW) formed around the vibrating portion and supporting the vibrating portion, and a first cover board (10), bonded to the piezoelectric vibrating board, has excitation electrodes which excite the vibrating portion, and a surrounding portion formed around the excitation electrodes at a position corresponding to the vibrating portion, at least one of the support frame portion of the piezoelectric vibrating board and the surrounding portion of the first cover board includes a first convexity (11) which surrounds the entire circumference of the vibrating portion at height for maintaining the vibrating portion and the excitation electrode in the predetermined gap, and the piezoelectric vibrating board and the first cover board are bonded by adhesives (23) applied surrounding the entire circumference of the vibrating portion adjacent the first convexity but not on the first convexity. |
